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Excellent web-site with more than 30 free online articles with the "How's" and "Whys" to use and understand vacuum. Good for beginners and advanced users.
Typical papers cover new developments in vacuum pumping and instrumentation, vacuum measurement, kinetic theory, gas-surface interactions, surface analysis, plasma and ion-surface interactions and etching, nanometer-scale processing, ion implantation, surface modification and coating industry, PVD, CVD and ion/plasma-assisted PVD/CVD.
Provides a vehicle for the publication of research dealing with microelectronics and nanometer structures.
Devoted to reports of original research, review articles, and Critical Review articles. JVST A includes topics such as applied surface science, electronic materials and processing, fusion technology, plasma technology, surface science, thin films, vacuum metallurgy, and vacuum technology.
Science /
Physics /
Publications
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